MIT wafer dot lamp defect testing equipment

This is an integrated inspection device for 8/12-inch Micro LED/OLED wafer illumination AOI inspection, combining a self-developed EFEM wafer loading and unloading system, motion platform, probe card module, signal output from a signal transmitter, a spectrometer, and AOI inspection functions. It performs illumination inspection and screening of Micro OLED wafers before dicing.